Scalloping and Stress Concentration in DRIE-Manufactured...

Actuators 2018 / 09 Vol. 7; Iss. 3

Scalloping and Stress Concentration in DRIE-Manufactured Comb-Drives

Bertini, Silvia, Verotti, Matteo, Bagolini, Alvise, Bellutti, Pierliugi, Ruta, Giuseppe, Belfiore, Nicola
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Volume:
7
Language:
english
Journal:
Actuators
DOI:
10.3390/act7030057
Date:
September, 2018
File:
PDF, 15.69 MB
english, 2018
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