Chromatic confocal microscopy to rapidly reveal nanoscale surface/interface topography by position-sensitive detection
Zhuo, Guan-Yu, Hsu, Chia-Huan, Wang, Yen-Hsiang, Chan, Ming-CheVolume:
113
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.5040502
Date:
August, 2018
File:
PDF, 1.79 MB
english, 2018