![](/img/cover-not-exists.png)
[IEEE 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Shanghai, China (2018.8.8-2018.8.11)] 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - A novel approach to calculate the deposition uniformity of multi-target sputtering system
Zhu, Guo, Sun, Jiangping, Gan, ZhiyinYear:
2018
Language:
english
DOI:
10.1109/ICEPT.2018.8480559
File:
PDF, 7.83 MB
english, 2018