![](/img/cover-not-exists.png)
[ASME ASME 2012 International Mechanical Engineering Congress and Exposition - Houston, Texas, USA (Friday 9 November 2012)] Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B - Static Pull-In Analysis of Micro-Cantilevers in Wet Etching Fabrication Process
Darvishian, Ali, Moeenfard, Hamid, Ahmadian, Mohammad TaghiYear:
2012
Language:
english
DOI:
10.1115/IMECE2012-89237
File:
PDF, 1.08 MB
english, 2012