Strain Evaluation of Laser-Annealed SiGe Thin Layers

ECS Transactions 2018 / 07 Vol. 86; Iss. 7

Strain Evaluation of Laser-Annealed SiGe Thin Layers

Komago, Shota, Murakami, Tatsumi, Yoshioka, Kazutoshi, Yokogawa, Ryo, Borland, John O, Kuroi, Takashi, Tabata, Toshiyuki, Huet, Karim, Horiguchi, Naoto, Ogura, Atsushi
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Volume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08607.0059ecst
Date:
July, 2018
File:
PDF, 280 KB
english, 2018
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