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NEW OMCVD PRECURSORS FOR SELECTIVE COPPER METALLIZATION
NORMAN, J. A.T., MURATORE, B. A., DYER, P. N., ROBERTS, D. A., HOCHBERG, A. K.Volume:
2
Language:
english
Journal:
Le Journal de Physique IV
DOI:
10.1051/jp4:1991233
Date:
September, 1991
File:
PDF, 1.03 MB
english, 1991