Evaluation of Model for Determining Nitrogen Doping...

ECS Transactions 2018 / 07 Vol. 86; Iss. 12

Evaluation of Model for Determining Nitrogen Doping Concentration from Resultant Strain in Heavily Doped 4H-SiC Crystals

Ailihumaer, Tuerxun, Yang, Yu, Guo, Jianqiu, Raghothamachar, Balaji, Dudley, Michael
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Volume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08612.0053ecst
Date:
July, 2018
File:
PDF, 686 KB
english, 2018
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