Direct machining of curved trenches in silicon with...

Journal of the European Optical Society Rapid Publications 2013 / 03 Vol. 8

Direct machining of curved trenches in silicon with femtosecond accelerating beams

Mathis, A., Froehly, L., Furfaro, L., Jacquot, M., Dudley, J. M., Courvoisier, F.
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Volume:
8
Language:
english
Journal:
Journal of the European Optical Society: Rapid Publications
DOI:
10.2971/jeos.2013.13019
Date:
March, 2013
File:
PDF, 5.05 MB
english, 2013
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