Epitaxial ferroelectric Y-doped HfO 2...

Japanese Journal of Applied Physics 2018 / 11 Vol. 57; Iss. 11S

Epitaxial ferroelectric Y-doped HfO 2 film grown by the RF magnetron sputtering

Suzuki, Taisei, Shimizu, Takao, Mimura, Takanori, Uchida, Hiroshi, Funakubo, Hiroshi
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.11UF15
Date:
November, 2018
File:
PDF, 1.22 MB
english, 2018
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