Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 11 Vol. 36; Iss. 6
Optimized structure of standard sample with programed defects for pattern inspection using electron beams
Iida, Susumu, Uchiyama, TakayukiVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5048047
Date:
November, 2018
File:
PDF, 2.21 MB
english, 2018