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Studies on Super-Smooth Polishing. (2nd Report). Deconvolution Algorithm for Corrective Polishing.
NEGISHI, Mahito, ANDO, Manabu, TAKIMOTO, Masahumi, DEGUCHI, Akinobu, NAKAMURA, NobuoVolume:
62
Year:
1996
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.62.408
File:
PDF, 1.17 MB
english, 1996