A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection
Shi, Xiaoqing, Lu, Yulan, Xie, Bo, Li, Yadong, Wang, Junbo, Chen, Deyong, Chen, JianVolume:
18
Language:
english
Journal:
Sensors
DOI:
10.3390/s18082494
Date:
August, 2018
File:
PDF, 857 KB
english, 2018