Stacking of nanocrystalline graphene for nano-electro-mechanical (NEM) actuator applications
Jothiramalingam, Kulothungan, Schmidt, Marek E., Manoharan, Muruganathan, Hammam, Ahmed M. M., Mizuta, HiroshiLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-4180-z
Date:
October, 2018
File:
PDF, 1.41 MB
english, 2018