Environment friendly chemical mechanical polishing of...

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Applied Surface Science 2018 / 10

Environment friendly chemical mechanical polishing of copper

Zhang, Zhenyu, Cui, Junfeng, Zhang, Jiabo, Liu, Dongdong, Yu, Zhijian, Guo, Dongming
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.10.133
Date:
October, 2018
File:
PDF, 492 KB
english, 2018
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