Laser micromachining of silicon in air and ice layer
Tangwarodomnukun, Viboon, Mekloy, Seksit, Dumkum, Chaiya, Prateepasen, AsaVolume:
36
Language:
english
Journal:
Journal of Manufacturing Processes
DOI:
10.1016/j.jmapro.2018.10.008
Date:
December, 2018
File:
PDF, 10.09 MB
english, 2018