Formation and Properties of Locally Tensile Strained Ge...

Semiconductors 2018 / 11 Vol. 52; Iss. 11

Formation and Properties of Locally Tensile Strained Ge Microstructures for Silicon Photonics

Novikov, A. V., Yurasov, D. V., Morozova, E. E., Skorohodov, E. V., Verbus, V. A., Yablonskiy, A. N., Baidakova, N. A., Gusev, N. S., Kudryavtsev, K. E., Nezhdanov, A. V., Mashin, A. I.
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Volume:
52
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782618110167
Date:
November, 2018
File:
PDF, 566 KB
english, 2018
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