Inductively coupled array (INCA) discharge

Plasma Sources Science and Technology 2018 / 10 Vol. 27; Iss. 10

Inductively coupled array (INCA) discharge

Ahr, Philipp, Tsankov, Tsanko V, Kuhfeld, Jan, Czarnetzki, Uwe
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Volume:
27
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aadb69
Date:
October, 2018
File:
PDF, 2.08 MB
english, 2018
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