[IEEE 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Auckland, New Zealand (2018.7.9-2018.7.12)] 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - A Monolithic Serial-Kinematic Nanopositioner with Integrated Sensors and Actuators
Moore, Steven Ian, Omidbeike, Meysam, Fleming, Andrew, Yong, Yuen KuanYear:
2018
Language:
english
DOI:
10.1109/AIM.2018.8452225
File:
PDF, 3.21 MB
english, 2018