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[IEEE 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Shanghai, China (2018.8.8-2018.8.11)] 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Cu film surface reduction through formic acid vapor/solution for 3-D interconnection
Yang, Wenhua, Zhou, Chenggong, Zhou, Jie, Lu, Yangting, Lu, Yingchun, Suga, TadatomoYear:
2018
Language:
english
DOI:
10.1109/ICEPT.2018.8480473
File:
PDF, 7.76 MB
english, 2018