Near-threshold sputter yields of ruthenium under argon and...

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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2018 / 10

Near-threshold sputter yields of ruthenium under argon and nitrogen ion bombardment

Phadke, Parikshit, Sturm, Jacobus M., van de Kruijs, Robbert W.E., Bijkerk, Fred
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Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2018.10.001
Date:
October, 2018
File:
PDF, 788 KB
english, 2018
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