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Thermal-Piezoresistive Tuning of the Effective Quality Factor of a Micromechanical Resonator
Miller, James M. Lehto, Zhu, Haoshen, Heinz, David B., Chen, Yunhan, Flader, Ian B., Shin, Dongsuk D., Lee, Joshua E.-Y., Kenny, Thomas W.Volume:
10
Language:
english
Journal:
Physical Review Applied
DOI:
10.1103/PhysRevApplied.10.044055
Date:
October, 2018
File:
PDF, 1.02 MB
english, 2018