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[IEEE 2018 IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2018.8.15-2018.8.17)] 2018 IEEE International Conference on Semiconductor Electronics (ICSE) - Effect of DRIE on the Structure of Si based Filtration Pore Arrays Fabricated with Double Side Aluminium Coating Layer
Mustafa, Kamarul'Asyikin, Yunas, Jumril, Hamzah, Azrul Azlan, Fikri Wan Ali, Wan Ammar, Majlis, Burhanuddin YeopYear:
2018
Language:
english
DOI:
10.1109/SMELEC.2018.8481210
File:
PDF, 1.70 MB
english, 2018