Numerical Simulation of Plasma Kinetics in a Low-Pressure...

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Numerical Simulation of Plasma Kinetics in a Low-Pressure Inductively Coupled Discharge in Argon and Mercury Mixtures

Ben Halima, Ahlem, Hajji, Salem, Barkaoui, Ghada, Charrada, Kamel, Zissis, Georges
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Year:
2018
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2018.2871258
File:
PDF, 3.19 MB
english, 2018
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