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Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors
Min, Joong-Hee, Chen, Yi-An, Chen, I-Te, Sun, Tianlei, Lee, Dennis T., Li, Chengjun, Zhu, Yong, O'Connor, Brendan T., Parsons, Gregory N., Chang, Chih-HaoLanguage:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201801379
Date:
October, 2018
File:
PDF, 2.85 MB
english, 2018