Recurrent feature-incorporated convolutional neural network...

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Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

Lee, Ki Bum, Kim, Chang Ouk
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Language:
english
Journal:
Journal of Intelligent Manufacturing
DOI:
10.1007/s10845-018-1437-4
Date:
July, 2018
File:
PDF, 2.09 MB
english, 2018
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