A novel spatial-distribution-function of electron...

A novel spatial-distribution-function of electron beam-induced vapor plume for analyzing EBPVD thickness

Ho, Ching-Yen, Chen, Bor-Chyuan, Xiong, Chang-Wei, Fan, Si-Li, Wan, Song-Feng, Li, Long-Gen, Shu, Yu-Feng, Yu, Xiao-Qiong
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5037826
Date:
August, 2018
File:
PDF, 831 KB
english, 2018
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