[IEEE 2018 2nd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech) - Kolkata (2018.5.4-2018.5.5)] 2018 2nd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech) - Precision Thermocouple Amplifier for Substrate Temperature Monitoring in an ECR-PE Nano-Film Deposition System

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