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[IEEE 2018 2nd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech) - Kolkata (2018.5.4-2018.5.5)] 2018 2nd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech) - Precision Thermocouple Amplifier for Substrate Temperature Monitoring in an ECR-PE Nano-Film Deposition System
Mukheriee, Aditva, Saha, TamojitYear:
2018
Language:
english
DOI:
10.1109/IEMENTECH.2018.8465349
File:
PDF, 7.50 MB
english, 2018