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Detection of the Interface-Trap Charge Density and Lateral Nonuniformity of Through-Silicon Vias
Kim, Kibeom, Ahn, Jangyong, Ahn, SeungyoungVolume:
28
Language:
english
Journal:
IEEE Microwave and Wireless Components Letters
DOI:
10.1109/LMWC.2018.2822731
Date:
May, 2018
File:
PDF, 462 KB
english, 2018