Optoelectronic System for Studying Nanodisplacements of Moving MEMS Elements
Kostsov, E. G., Skurlatov, A. I., Shcherbachenko, A. M.Volume:
54
Language:
english
Journal:
Optoelectronics, Instrumentation and Data Processing
DOI:
10.3103/S875669901804012X
Date:
July, 2018
File:
PDF, 285 KB
english, 2018