Effect of Inductively Couple Plasma-Based Oxygen Plasma...

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physica status solidi (a) 2018 / 10

Effect of Inductively Couple Plasma-Based Oxygen Plasma Treatment on AlGaN/GaN HEMT

He, Yunlong, Wang, Chong, Ma, Peijun, Wang, Zhan, Zhang, Meng, Yang, Ling, Zheng, Xuefeng, Guo, Lixin, Ma, Xiaohua, Hao, Yue
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201800481
Date:
October, 2018
File:
PDF, 1.27 MB
english, 2018
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