High quality factor mechanical resonance in a silicon...

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JETP Letters 2018 / 10

High quality factor mechanical resonance in a silicon nanowire

Presnov, D. E., Kafanov, S., Dorofeev, A. A., Bozhev, I. V., Trifonov, A. S., Pashkin, Yu. A., Krupenin, V. A.
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Language:
english
Journal:
JETP Letters
DOI:
10.1134/S0021364018190037
Date:
October, 2018
File:
PDF, 644 KB
english, 2018
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