Theoretical Study on Atomic Structures of Thermally Grown...

e-Journal of Surface Science and Nanotechnology 2006 Vol. 4

Theoretical Study on Atomic Structures of Thermally Grown Silicon Oxide/Silicon Interfaces

Kageshima, Hiroyuki, Uematsu, Masashi, Akagi, Kazuto, Tsuneyuki, Shinji, Akiyama, Toru, Shiraishi, Kenji
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Volume:
4
Year:
2006
Language:
english
Journal:
e-Journal of Surface Science and Nanotechnology
DOI:
10.1380/ejssnt.2006.584
File:
PDF, 605 KB
english, 2006
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