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Process optimization and device variation of Mg-doped ZnO FBARs
Duan, Franklin Li, Yang, Zhi, Ji, Zhonglin, Weng, Haotian, Xie, Ziyi, Shen, Allegro, Mi, Shijie, Chen, Xi, Chen, Yigang, Liu, QianhuiVolume:
151
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2018.10.015
Date:
January, 2019
File:
PDF, 1.76 MB
english, 2019