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Nanopatterning on the cylindrical surface using E-Beam pre-mapping algorithm
CHANG RIN, LEE, Ok, Jong G, Jeong, Myung YungLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aaea48
Date:
October, 2018
File:
PDF, 1.05 MB
english, 2018