Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type...

Plasma and Fusion Research 2008 Vol. 3

Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing

SHIM, Gyu Il, SUGAI, Hideo
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Volume:
3
Year:
2008
Language:
english
Journal:
Plasma and Fusion Research
DOI:
10.1585/pfr.3.051
File:
PDF, 401 KB
english, 2008
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