Structural alteration induced by substrate bias voltage...

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Diamond and Related Materials 2018 / 10

Structural alteration induced by substrate bias voltage variation in diamond-like carbon films fabricated by unbalanced magnetron sputtering

Nakamura, Morimasa, Takagawa, Yuka, Miura, Ken-ichi, Kobata, Junpei, Zhu, Wenliang, Nishiike, Naomichi, Arao, Kazuyuki, Marin, Elia, Pezzotti, Giuseppe
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Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2018.10.019
Date:
October, 2018
File:
PDF, 1.06 MB
english, 2018
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