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Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators
Siddiqi, Muhammad, Lee, JoshuaVolume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9080413
Date:
August, 2018
File:
PDF, 15.94 MB
english, 2018