A Two-Axis Water-Immersible Micro Scanning Mirror Driven by Single Inductor Coil through Dynamic Structural Filtering
Xu, Song, Duan, Xiaoyu, Zou, JunVolume:
284
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.10.029
Date:
December, 2018
File:
PDF, 3.60 MB
english, 2018