A precise spacing-control method in MEMS packaging for capacitive accelerometer applications
Wu, Wenjie, Liu, Dandan, Qiu, Wenrui, Liu, Huafeng, Hu, Fangjing, Fan, Ji, Hu, Chenyuan, Tu, LiangChengLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aae9cd
Date:
October, 2018
File:
PDF, 815 KB
english, 2018