Deposition of microcrystalline diamond films in H2 microwave plasma with graphite powder as hydrocarbon precursor
Yao, Kaili, Dai, Bing, Yang, Lei, Shu, Guoyang, Zhao, Jiwen, Liu, Kang, Cao, Wenxin, Ralchenko, Victor, Han, Jiecai, Zhu, JiaqiVolume:
669
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.10.044
Date:
January, 2019
File:
PDF, 906 KB
english, 2019