Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 11 Vol. 36; Iss. 6
Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration
McCoy, Jake A., McEntaffer, Randall L., Eichfeld, Chad M.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5048197
Date:
November, 2018
File:
PDF, 2.08 MB
english, 2018