Thin-film silicon MEMS electronics for ubiquitous sensors applications (uMEMS)
Chu, Virginia, Pedro Conde, João, Gaspar, JoãoVolume:
2018
Language:
english
Journal:
Impact
DOI:
10.21820/23987073.2018.39
Date:
March, 2018
File:
PDF, 493 KB
english, 2018