Hierarchy of models for electrostatic comb-drive actuators...

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Journal of Micromechanics and Microengineering 2018 / 10

Hierarchy of models for electrostatic comb-drive actuators in electrolytes

Dibua, Ohiremen, Ramsurrun, Sheetal, Mani, Ali, Pruitt, B L, Iaccarino, Gianluca
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Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aae9bb
Date:
October, 2018
File:
PDF, 3.88 MB
english, 2018
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