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Journal of Microelectromechanical Systems 2018

Sensitivity Optimization of Wafer Bonded Gravimetric CMUT Sensors

Molgaard, Mathias J. G., Hansen, Jesper M. F., Jakobsen, Mogens H., Thomsen, Erik V.
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Year:
2018
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2868864
File:
PDF, 3.60 MB
english, 2018
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