Particle behavior and its contribution to film growth in a...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 09 Vol. 36; Iss. 5

Particle behavior and its contribution to film growth in a remote silane plasma

Kim, Yeonwon, Koga, Kazunori, Shiratani, Masaharu
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5037539
Date:
September, 2018
File:
PDF, 2.66 MB
english, 2018
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