(Invited) Computer Simulation of Intrinsic...

ECS Transactions 2018 / 07 Vol. 86; Iss. 10

(Invited) Computer Simulation of Intrinsic Point Defect Distribution Valid for All Pulling Conditions in Large-Diameter Czochralski Si Crystal Growth

Sueoka, Koji, Mukaiyama, Yuji, Kobayashi, Koji, Fukuda, Hiroaki, Yamaoka, Shunta, Maeda, Susumu, Iizuka, Masaya, Mamedov, Vasif M
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Volume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08610.0003ecst
Date:
July, 2018
File:
PDF, 1.41 MB
english, 2018
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