Resolution improvement in electromagnetically actuated...

Resolution improvement in electromagnetically actuated Wheatstone bridge configuration micromechanical resonators

Moczała, Magdalena, Sierakowski, Andrzej, Babij, Michał, Kwoka, Krzysztof, Dobrowolski, Rafał, Radojewski, Jacek, Piasecki, Tomasz, Gotszalk, Teodor
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Volume:
284
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.10.028
Date:
December, 2018
File:
PDF, 1.22 MB
english, 2018
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