Resolution improvement in electromagnetically actuated Wheatstone bridge configuration micromechanical resonators
Moczała, Magdalena, Sierakowski, Andrzej, Babij, Michał, Kwoka, Krzysztof, Dobrowolski, Rafał, Radojewski, Jacek, Piasecki, Tomasz, Gotszalk, TeodorVolume:
284
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.10.028
Date:
December, 2018
File:
PDF, 1.22 MB
english, 2018