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VO n Complexes in RTA Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy
Kot, Dawid, Kissinger, Gudrun, Dabrowski, Jaroslaw, Sattler, AndreasVolume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08610.0095ecst
Date:
July, 2018
File:
PDF, 318 KB
english, 2018