Influence of shallow versus deep etching on dark current and quantum efficiency in InAs/GaSb superlattice photodetectors and focal plane arrays for long wavelength infrared detection
Höglund, L., Rodriguez, J.B., Marcks von Würtemberg, R., Naureen, S., Ivanov, R., Asplund, C., Alchaar, R., Christol, P., Rouvié, A., Brocal, J., Saint-Pé, O., Costard, E.Language:
english
Journal:
Infrared Physics & Technology
DOI:
10.1016/j.infrared.2018.10.036
Date:
October, 2018
File:
PDF, 1.71 MB
english, 2018