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Modeling of reactive sputtering of hot titanium target in nitrogen and oxygen
Goncharov, A O, Minzhulina, E A, Shapovalov, V IVolume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012020
Date:
July, 2018
File:
PDF, 738 KB
english, 2018